Microstructure and mechanical properties of HfBx coatings deposited on cemented carbide substrates by HiPIMS and DCMS

HfBx coatings were deposited on cemented carbide substrates by direct current magnetron sputtering (DCMS) and high-power impulse (HiPIMS). The effect of the deposition conditions, i.e., temperature, bias voltage gas pressure, crystal structure mechanical properties analyzed systematically. results show that DCMS-deposited has random orientations HfB2(001), (100), (101) (102), whereas HiPIMS-deposited one less with high intensity in HfB2(001). Higher higher lower pressure lead to coating stronger HfB2(001)-preferred orientation because adatom mobility. have a columnar microstructure rough surface morphology. In contrast, an extremely dense smooth surface, mainly due ion bombardment. Attributing crystallinity density, HiPIMS superhardness up 49.3 ± 3.6 GPa Young's modulus 667.0 9.2 GPa. HfBx, other hand, much hardness between 27.3 4.2 36.3 2.5 Moreover, excellent adhesion (>100 N) substrate can be obtained, originating from chemical diffusion locking interface.